GZ-RTP-SM-12 is a semi-automatic vertical rapid thermal processing system applied for heating single 4-12 inch wafer
Max. Temp. 1250℃
Max. 4 gas lines
GZ-RTP-SM-12 is a semi-automatic vertical rapid thermal processing system applied for heating single 4-12 inch wafer
Max. Temp. 1250℃
Max. 4 gas lines
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