High Vacuum Oven features directly heated shelves that can be programmed to heat up to 300oC. The high vacuum chamber can easily pump down to 10-6 Torr, pumped by a turbo pump which is backed by a dry scroll pump (with no oil back-streaming to worry about). While it is very fast to heat up, the cooldown process can be slow (several hours). To preserve the interior surfaces from excessive oxidation, the chamber can only be vented once the shelves have dropped below 100oC. The chamber is vented with nitrogen. A partial vent is possible if you need to allow your sample to cool completely down to ambient temperature while in a nitrogen atmosphere. There are two approximately 11" x 11" (280 mm x 280 mm) shelves, and two custom made aluminum trays. It can bake eight 4" wafers at a time. There are no windows, so light sensitive parts can be baked as long as they are wrapped in foil on the way into the chamber.